A Merten
Broadband tuning of MIR-infrared radiation from 3 to 10 μm may be a very promising way for spectroscopic study of gaseous, liquid, or solid species or intermixtures. We report a quick broadband tunable IR-light source supported the mixture of a quantum-cascade-laser and micro-opto-electro-mechanical systems (MOEMS) with integrated diffractive grating. This idea unites the benefits of broadband sources with the benefits of coherent laser sources during a miniaturized setup. The grating is processed inline within the MOEMS production process by non-isotropic etching.
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